Title: | Robotic Automation | |||
URL: | http://www.kensingtonlabs.com | |||
Page Rank: | -1 | |||
ID: | 1392 | |||
Category: | |___OrangeLinker | |||
Description: | This report describes a simulation study characterizing the advantages and disadvantages of implementing multiple load ports on metrology equipment in a semiconductor factory. Three methods of automated material handling (AMH) for 300 mm. | |||
Alexa Ranking: | 0 | |||
Alexa LinksIN: | 0 | |||
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